Chamber injector

ABSTRACT

Embodiments described herein generally relate to apparatus for fabricating semiconductor devices. A gas injection apparatus is coupled to a first gas source and a second gas source. Gases from the first gas source and second gas source may remain separated until the gases enter a process volume in a process chamber. A coolant is flowed through a channel in the gas injection apparatus to cool the first gas and the second gas in the gas injection apparatus. The coolant functions to prevent thermal decomposition of the gases by mitigating the influence of thermal radiation from the process chamber. In one embodiment, the channel surrounds a first conduit with the first gas and a second conduit with the second gas.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims benefit of U.S. Provisional Patent ApplicationNo. 62/750,376, filed Oct. 25, 2018, and claims benefit ofIN201841032311, filed Aug. 29, 2018, the entirety of which are hereinincorporated by reference.

BACKGROUND Field

Embodiments disclosed herein generally relate to the field ofsemiconductor manufacturing equipment, and more specifically, anapparatus for gas injection with active cooling and gas separation.

Description of the Related Art

Hot surfaces within CVD process chambers and components thereof may leadto the decomposition of the precursors which results in deposition onthe chamber components before reaching the processing volume. Forexample, heating of a channel used to deliver the precursors to theprocessing volume may cause undesirable deposition within the channel.This premature decomposition results in clogging of the flow path andmay alter flow characteristics of the precursors into the processingvolume. Continued deposition on these surfaces not only impedes flow ofthe precursors but may also lead to stress and coefficient of thermalexpansion (CTE) induced delamination of a deposited film. The CTEinduced delamination may generate particles in the processing volume.

Thus, what is needed in the art are improved gas injection apparatus andmethods of fabricating gas injection apparatus.

SUMMARY

In one embodiment, an injector apparatus is provided which includes aninjector body. The injector apparatus includes a first arcuate surfaceof the injector body having a first outlet formed therein. The firstoutlet is in fluid communication with a first conduit formed within theinjector body. A second arcuate surface of the injector body has asecond outlet formed therein. The second outlet is in fluidcommunication with a second conduit formed within the injector body. Theinjector apparatus also includes a channel formed within the injectorbody. A first portion of the channel is disposed on a first side of thefirst conduit and a second side of the first conduit opposite the firstside of the first conduit adjacent to the first arcuate surface. Asecond portion of the channel is formed within the injector body, thesecond portion of the channel being disposed on a first side of thesecond conduit and a second side of the second conduit opposite thefirst side of the second conduit adjacent to the second arcuate surface.

In another embodiment, a substrate processing apparatus is providedwhich includes a chamber body enclosing a process volume, a housingstructure enclosing the chamber body, a plurality of heating lampsdisposed within the housing structure, a first quartz window disposedwithin the housing structure between the process volume and theplurality of heating lamps, and an injector apparatus coupled to thechamber body. The injector apparatus includes a first arcuate surface ofthe injector body having a first outlet formed therein. The first outletis in fluid communication with a first conduit formed within theinjector body. A second arcuate surface of the injector body has asecond outlet formed therein. The second outlet is in fluidcommunication with a second conduit formed within the injector body. Theinjector apparatus also includes a channel formed within the injectorbody. A first portion of a channel is disposed on a first side of thefirst conduit and a second side of the first conduit opposite the firstside of the first conduit adjacent to the first arcuate surface. Asecond portion of the channel is formed within the injector body, thesecond portion of the channel being disposed on a first side of thesecond conduit and a second side of the second conduit opposite thefirst side of the second conduit adjacent to the second arcuate surface.

In yet another embodiment, a structure embodied in a machine readablemedium used in a design process is provided. The structure includes aninjector body. The structure also includes a first arcuate surface ofthe injector body having a first outlet formed therein. The first outletis in fluid communication with a first conduit formed within theinjector body. A second arcuate surface of the injector body has asecond outlet formed therein. The second outlet is in fluidcommunication with a second conduit formed within the injector body. Theinjector apparatus also includes a channel formed within the injectorbody. A first portion of a channel is disposed on a first side of thefirst conduit and a second side of the first conduit opposite the firstside of the first conduit adjacent to the first arcuate surface. Asecond portion of the channel is formed within the injector body, thesecond portion of the channel being disposed on a first side of thesecond conduit and a second side of the second conduit opposite thefirst side of the second conduit adjacent to the second arcuate surface.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this disclosure and are therefore not to beconsidered limiting of its scope, for the disclosure may admit to otherequally effective embodiments.

FIG. 1 illustrates a schematic side cross-sectional view of a processchamber according to an embodiment of the disclosure.

FIG. 2 illustrates a front perspective view of an injector apparatusaccording to an embodiment of the disclosure.

FIG. 3 illustrates a rear perspective view of the injector apparatus ofFIG. 2 according to an embodiment of the disclosure.

FIG. 4A illustrates a schematic side cross-sectional view of a portionof the injector apparatus according to an embodiment of the disclosure.

FIG. 4B illustrates a schematic side cross-sectional view of a portionof the injector apparatus according to an embodiment of the disclosure.

FIG. 5 illustrates a schematic cross-sectional view of the injectorapparatus according to an embodiment of the disclosure.

FIG. 6 illustrates a schematic cross-sectional view of a portion of theinjector apparatus according to an embodiment of the disclosure.

FIG. 7 illustrates a schematic representation of a computer system witha computer-readable medium according to an embodiment of the disclosure.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements disclosed in oneembodiment may be beneficially utilized on other embodiments withoutspecific recitation.

DETAILED DESCRIPTION

Embodiments described herein generally relate to apparatus forfabricating semiconductor devices. A gas injection apparatus is coupledto a first gas source and a second gas source. Gases from the first gassource and second gas source may remain separated until the gases entera process volume in a process chamber. A coolant is flowed through achannel in the gas injection apparatus to cool the first gas and thesecond gas in the gas injection apparatus. The coolant functions toprevent thermal decomposition of the gases by mitigating the influenceof thermal radiation from the process chamber. In one embodiment, thechannel surrounds a first conduit with the first gas and a secondconduit with the second gas.

The injector apparatus is also configured to reduce the influence ofthermal energy radiating from the process volume by insulating and/orcooling the precursor gases before the gases enter the process volume.In one embodiment, the injector apparatus includes a channel formedtherein. Cooling fluid is flowed through the channel to remove heatabsorbed by the injector apparatus from the process volume.

FIG. 1 is a schematic side cross-sectional view of a process chamber 100according to an embodiment described herein. The process chamber 100 maybe utilized for performing chemical vapor deposition, such as epitaxialdeposition processes, although the process chamber 100 may be utilizedfor etching or other processes. Non-limiting examples of the processchamber 100 include the CENTURA® RP EPI reactor, which is commerciallyavailable from Applied Materials, Inc. of Santa Clara, Calif. While theprocess chamber 100 described herein may be utilized to practice variousembodiments described herein, other suitably configured process chambersfrom different manufacturers may also be used to practice theembodiments described in this disclosure.

The process chamber 100 includes a housing structure 102 fabricated froma process resistant material, such as aluminum or stainless steel. Thehousing structure 102 encloses various functioning elements of theprocess chamber 100, such as a quartz chamber 104, which includes aprocess volume 110, an additional volume 108, and a baseplate 131 inwhich a process volume 110 is defined. A substrate support 112 isdisposed in and adapted to receive a substrate 114 within the quartzchamber 104. In one embodiment, the substrate support 112 if fabricatedfrom a ceramic material. In another embodiment, the substrate support112 is fabricated from a graphite material coated with a siliconcontaining material, such as a silicon carbide material. A lid 103 isdisposed on the housing structure opposite the quartz chamber 104. Thelid 103 at least partially defines a volume 140 between the quartzchamber 104 and the lid 103.

Reactive species derived from one or more precursors are exposed to aprocess surface 116 of the substrate 114. Byproducts from depositionprocesses and the reactive species exposure are subsequently removedfrom the process surface 116. Heating of the substrate 114 and/or theprocess volume 110 is performed by one or more radiation sources, suchas lamp modules 118A and 118B. In one embodiment, the lamp modules 118Aand 118B are infrared lamps.

Radiation from the lamp modules 118A and 118B travels through a firstquartz window 120 of the quartz chamber 104, and through a second quartzwindow 122 of the quartz chamber 104. In this embodiment, the firstquartz window 120 and the second quartz window 122 are fabricated from aquartz containing material which is substantially transparent to awavelength of the radiation emitted from the lamp modules 118A and 118B.In one embodiment, the first quartz window 120 and the second quartzwindow 122 are disposed opposite one another. In one embodiment, thefirst quartz window 120 is positioned between the lamp modules 118A andthe process volume 110. In another embodiment, the second quartz window122 is positioned between the lamp modules 118B and the process volume110.

Reactive species are delivered to the quartz chamber 104 by a gasinjector apparatus 128. In one embodiment, the injector apparatus 128 isa unitary body with one or more conduits and channels formed therein, asdiscussed in detail hereinafter. Processing byproducts are removed fromthe process volume 110 by an exhaust assembly 130 which is in fluidcommunication with a vacuum source (not shown). Precursor reactantmaterials, as well as diluent, purge, and vent gases for the processchamber 100 enter the process volume 110 through the gas injectorapparatus 128 and exit the process volume 110 through the exhaustassembly 130.

The process chamber 100 also includes multiple liners 132A-132D whichshield the baseplate 131 and metallic walls 134 from the process volume110. In one embodiment, the liners 132A-132D include a process kit thatcovers all metallic components that may be in communication with orotherwise exposed to the process volume 110. Liner 132A is disposed inthe additional volume 108. Liner 132B is disposed at least partially inthe additional volume 108 and is adjacent the liner 132A. An exhaustinsert liner assembly 132C is disposed adjacent the liner 132B. Theexhaust liner 132D may be disposed adjacent the exhaust insert linerassembly 132C and may replace a portion of the liner 132B to facilitateinstallation.

The injector apparatus 128 includes an injector body 125 with aplurality of conduits, such as a first conduit 190, a second conduit192, formed therein. One or more gases are provided to the processvolume 110 from a first gas source 135A and a second gas source 135Bthrough the first conduit 190 and the second conduit 192, respectively.For example, the first gas source 135A provides a first gas to theprocess volume 110 via the first conduit 190 formed in the injector body125 and the second gas source 135B provides a second gas to the processvolume 110 through the second conduit 192 formed in the injector body125. The first conduit 190 and the second conduit 192 keep the first andsecond gases separated until the gases reach the process volume 110.

One or more first valves (not shown) are disposed on one or moreconduits 155A which couple the first gas source 135A to the processchamber 100. Similarly, one or more second valves (not shown) aredisposed on one or more conduits 155B which couple the second gas source135B to the process chamber 100. The first valves and the second valvesare adapted to control the flow of gas from the gas sources 135A, 135B.The first valves and the second valves may be any type of suitable gascontrol valve, such as a needle valve or a pneumatic valve. In oneembodiment, the one or more first valves are configured to provide agreater flow of gas from the first gas source 135A to a center region ofthe substrate 114. Each of the first valves and the second valves arecontrolled independently of one another and each of the first valves andthe second valves are at least partially responsible for determining gasflow within the process volume 110.

Gas from both the first gas source 135A and the second gas source 135Btravels through the one or more outlets 136A and 136B formed in theinjector body 125. In one embodiment, gas provided from the first gassource 135A travels through the outlet 136A and gas provided from thesecond gas source 135B travels through the outlet 136B. In anotherembodiment, the first gas source 135A provides a first process gas andthe second gas source 135B provides a second process gas different fromthe first process gas. A coolant fluid is provided to the gas injectorapparatus 128 via a coolant source 160. The coolant fluid is flowedthrough a channel 142 formed in the injector body 125.

The one or more outlets 136A and 136B formed in the injector body 125are coupled to outlets configured for a laminar flow path 133A or ajetted flow path 133B. The outlets 136A and 136B are configured toprovide individual or multiple gas flows with varied parameters, such asvelocity, density, or composition. In one embodiment where multipleoutlets 136A and 136B are adapted, the outlets 136A and 136B aredistributed along a portion of the gas injector apparatus 128 (e.g.,injector body 125) in a substantially linear arrangement to provide agas flow that is wide enough to substantially cover the diameter of thesubstrate 114. For example, each of the outlets 136A and 136B arearranged in at least one linear group to provide a gas flow generallycorresponding to the diameter of the substrate. Alternatively, theoutlets 136A and 136B are arranged in substantially the same plane orlevel for flowing the gas(es) in a planar, laminar fashion. The outlets136A and 1366 may be spaced evenly along the injector liner 132E or maybe spaced with varying densities. For example, one or both of theoutlets 136A and 136B may be more heavily concentrated at a region ofthe injector liner 132E corresponding to a center of the substrate.

In some embodiments, the density of outlets 136A is greater than adensity of outlets 136B. For example, each outlet 136B formed in theinjector body 125 corresponds to a plurality of outlets 136A.Additionally, a size and shape of outlets 136B may differ from a sizeand shape of the outlets 136A, as discussed below with respect to FIG.2.

Each of the flow paths 133A, 1336 is configured to flow across alongitudinal axis A″ of the process chamber 100 in a laminar ornon-laminar flow fashion to the exhaust liner 132D. The flow paths 133A,133B are generally coplanar with the axis A′ or may be angled relativeto the axis A′. For example, the flow paths 133A, 133B may be angledupward or downward relative to the axis A′. The axis A′ is substantiallynormal to the longitudinal axis A″ of the process chamber 100. The flowpaths 133A, 133B culminate in an exhaust flow path 133C and flow into aplenum 137 formed in the exhaust liner 132D. The plenum 137 is coupledto an exhaust or vacuum pump (not shown).

The injector apparatus 128 shown in FIGS. 2-6 may be used to practicevarious embodiments of the deposition process discussed in thisdisclosure. FIG. 2 illustrates a perspective view of one embodiment ofan injector apparatus 128. As shown, the injector apparatus 128 includesthe injector body 125, a first protrusion 210, a second protrusion 230,and a projection 240. The projection 240 includes a first arcuatesurface 242 and a second arcuate surface 244. In one embodiment, thefirst arcuate surface 242 is disposed radially inward of the secondarcuate surface 244. A surface 209 of the projection 240 extends fromthe second arcuate surface 244 to the first arcuate surface 242. Thesurface 209 is substantially normal to the first and second arcuatesurfaces 242 and 244.

A first plurality of outlets 136A is formed in the first arcuate surface242. The plurality of outlets 136A are in fluid communication with aconduit (not shown) formed within the injector body 125, such as thefirst conduit 190 illustrated in FIG. 1. While each of the firstplurality of outlets 136A is circular in FIG. 1, the outlets 136A maytake many other shapes, such as ellipsoidal, conical, etc. A volume ofeach of the first plurality of outlets 136A may be changed based on gasflow parameters to perform a process in the process chamber 100.

A second plurality of outlets 136B is formed in the second arcuatesurface 244. In one embodiment, each of the outlets 136B are acontinuous opening formed in the second arcuate surface 244 and in fluidcommunication with a conduit (not illustrated) formed within theinjector body 125, such as the second conduit 192 in FIG. 1. A volume ofthe outlet 1366 in a first portion 204 of the projection 240 is greaterthan a combined volume of the plurality of outlets 136A in the firstarcuate surface 242 and in the first portion 204 of the projection 240.Similarly, a volume of outlet 136B in a second portion 208 of theprojection 240 may be greater than a combined volume of the outlets 136Ain the second portion 208 of the projection 240.

In operation, a first process gas enters the process volume 110 throughthe outlets 136A in the first portion 204 of the projection 240. Thefirst process gas may also enter the process volume 110 through theoutlets 136A in the second portion 208 of the projection 240. The gasentering the process volume 110 through the outlets 136A in the secondportion 208 may be at a different flow rate than the gas enteringthrough the outlets 136A in the first portion 204. Different flow ratesof the first process gas enable the gas to reach different areas withinthe process volume 110. For example, a higher flow rate of the firstprocess gas projects the gas further into the process volume 110 than alower flow rate. In addition, the smaller volume of the outlets 136A inthe first arcuate surface 242 may cause an increase in a velocity of theprocess gas entering the process volume 110 according to Bernoulli'sprinciple.

A second process gas enters the process volume 110 through the outlets136B. In one embodiment, the second process gas enters the processvolume 110 at a different velocity and flow rate than the first processgas. For example, the second process gas may not be affected byBernoulli's principle to the extent of the first process gas flowingthrough outlets 136A. Thus, the first process gas may flow further fromthe first arcuate surface 242 and into the process volume 110 than thesecond process gas. In one embodiment, the first process gas isTrimethylgallium (TMGa) and the second process gas is ammonia (NH₃).

As shown, the first protrusion 210 includes connections 212, 214, 216,218, and 220 for various fluid sources (not shown). Connection 212 is influid communication with the outlets 136A in the first portion 204 ofthe projection 240 via a first conduit (not shown) formed within theinjector body 125. Similarly, connection 214 is in fluid communicationwith the outlet 136B in the first portion 204 of the projection 240 viaa second conduit (not shown) formed within the injector body 125.Connection 216 may be in fluid communication with a first purge outlet,as discussed with respect to FIG. 3, to provide a purge gas to a portionof the process volume 110 via a third conduit (not shown) formed withinthe injector body 125.

Connection 220 is in fluid communication with connection 218 via achannel (not shown) formed within the injector body 125. The channel isformed within the injector body 125 from the connection 220 to a firstend 250 of the projection 240. The channel continues within theprojection 240 and adjacent to the first arcuate surface 242 to a secondend 252 of the projection 240. The channel continues in the projection240 adjacent to the second arcuate surface 244 to the first end 250,where the channel is fluidly connected to the connection 218. Many othervariations of a design of the channel are possible. For example, thechannel may flow only one direction through the projection 240. Further,a shape of the channel may be modified to achieve desired heat transferfrom the injector body 125 to the cooling fluid.

A first portion of the channel within the projection 240 adjacent to thefirst arcuate surface 242 is disposed on a first side and a second sideof the first conduit which is in fluid communication with each of theoutlets 136A. A second portion of the channel within the projection 240adjacent to the second arcuate surface 244 is disposed on a first sideand a second side of the second conduit which is in fluid communicationwith the outlets 136B. A cooling fluid enters the injector body 125through the connection 220, flows through the channel adjacent to thefirst arcuate surface 242 from the first end 250 to the second end 252,flows through the channel adjacent to the second arcuate surface 244from the second end 252 to the first end 250, and exits the injectorbody through the connection 218. In some embodiments, the cooling fluidenters the injector body 125 through connection 218 and exits theinjector body 125 through connection 220.

The second protrusion 230 includes connections 232, 234, and 236 forfluid sources (not shown). Connection 234 is in fluid communication withoutlets 136A in the second portion 208 of the projection 240 via afourth conduit (not shown) formed within the injector body 125.Connection 236 is in fluid communication with the outlet 136B in thesecond portion 208 of the projection 240 via a fifth conduit (not shown)formed within the injector body 125. Connection 232 is in fluidcommunication with a second purge outlet, as discussed with respect toFIG. 3, via a sixth conduit (not shown) formed within the injector body125.

To form the conduits and channels within the injector body 125,traditional subtractive manufacturing methods are insufficient. Forexample, to accommodate each of the conduits and channels within theinjector body 125, the conduits and channels may be curved and compriseturns wholly within the injector body. Traditional subtractive methodsare not able to conform to the intricate paths of the conduits andchannels. However, additive manufacturing techniques, such as 3Dprinting, can be used to design and manufacture the injector apparatus128 with the conduits and channels formed therein.

In one embodiment, the injector apparatus 128 is fabricated usingadditive manufacturing, such as 3D printing. A print direction of theinjector apparatus 128 is illustrated by an arrow 260, which isorthogonal to a direction between a first surface 262 of the injectorbody 125 and a second surface 264 of the injector body 125. The secondsurface 264 is opposite and parallel to the first surface 262. That is,the first arcuate surface 242 is formed before the second arcuatesurface 244, and the second arcuate surface 244 is formed before theinjector body 125. Printing the injector apparatus 128 in the directionof the arrow 260 enables features of the injector apparatus 128 (e.g.,the outlets 136A, 136B, the conduits and channels, the projection 240,etc.) to be printed accurately and reduces an occurrence of deformedfeatures of the injector apparatus 128.

Alternatively or in addition to additive manufacturing, abrasive flowmachining may be used to form the conduits and channels within theinjector body 125. Abrasive flow machining may reduce or eliminateutilization of post-processing operations to smooth an interior surfaceof the conduits and channels. Further, abrasive flow machining may beused in post-processing to smooth the interior surface of the conduitsand channels. In one embodiment, the injector apparatus 128 is made of aprocess and corrosion resistant material such as 316 stainless steel orInconel®, or alloys thereof. More specifically, the material of theinjector apparatus 128 is selected to be resistant to corrosion causedby a cleaning fluid such as chlorine. The cleaning fluid may be used toremove deposited particles in the process chamber 100 and within theconduits and channels.

FIG. 3 illustrates a perspective view of one embodiment of the injectorapparatus 128 opposite the perspective view of FIG. 2. A recess 308 isformed into a surface 312 of the projection 240 adjacent to the firstarcuate surface 242. A first purge outlet 302 is formed into a surface316 of the recess 308 and is in fluid communication with connection 216via the third conduit (not shown) formed within the injector body 125.Although one first purge outlet 302 is depicted in FIG. 3, a pluralityof first purge outlets 302 may be formed in the surface 316.

A channel 310 is formed into a surface 314 of the projection 240opposite the first arcuate surface 242 and adjacent to the surface 316.The channel 310 is formed into the surface 314 and advances from asecond purge outlet 306 to the second end 252 of the projection 240. Thesecond purge outlet 306 is in fluid communication with the channel 310.The second purge outlet is also in fluid communication with connection232 via the sixth conduit (not shown) formed within the injector body125. In operation, a second purge gas flows through channel 310 toprevent particles from entering into the process volume 110. The secondpurge gas may include hydrogen, nitrogen, ammonia, other like gases, andany combination thereof.

In some embodiments, caps 304 are disposed on the surface 316 in therecess 308. The caps 304 are adhered to the surface 316 via a weld andmay be fabricated from the same or a similar material as the injectorapparatus 128. The caps 304 confine a volume of the third conduit whichis in fluid communication with connections 218 and 220. The caps 304enable an interior surface of the third conduit to be smoothed after theinjector body 125 is formed. Further, with the caps 304 removed, anelectro plating process can be performed on an interior surface of theconduits (and channels) to increase corrosion resistance.Post-processing (e.g., smoothing and electro-plating) of the conduitsand channels may prevent condensation and agglomeration of a gas flowingtherethrough from impeding flow through the injector body 125. Thus,post-processing is believed to decrease maintenance intervals forcleaning the interior of the injector body 125. After post-processing,an RMS surface roughness of the interior surface of the conduits andchannels may be less than about 50 microns, for example, less than about25 microns, for example less than about 5 microns, such as less thanabout 0.5 microns.

FIG. 4A illustrates a schematic side cross-sectional view of a portionof an injector apparatus 128. As shown, the channel 310 is recessed intothe surface 314 of the injector apparatus 128. A first channel 402, 406and a second channel 404, 408 are formed within the injector apparatus128. A first portion of the first channel 402 is disposed on a firstside of the first conduit 190 adjacent the first arcuate surface 242. Asecond portion of the first channel 406 is disposed on a second side ofthe first conduit 190 opposite the first side of the first conduit 190.The second portion of the first channel 406 is adjacent the firstarcuate surface 242 and adjacent the surface 209 of the projection 240.

A first portion of the second channel 404 is disposed on a first side ofthe second conduit 192 adjacent the second arcuate surface 244. A secondportion of the second channel 408 is disposed on a second side of thesecond conduit 192 opposite the first side of the second conduit 192.The second portion of the second channel 408 is adjacent the secondarcuate surface 244.

The first and second portions of the first channel 402, 406 are in fluidcommunication with the first and second portions of the second channel404, 408. A volume of the first and second portions of the first channel402, 406 is less than a volume of the first and second portions of thesecond channel 404, 408 to increase a rate of flow through the first andsecond portions of the first channel 402, 406 (assuming constant fluidpressure). That is, a rate of flow of cooling fluid flowing through thefirst channel 402, 406 will be greater than a flow rate of cooling fluidflowing through the second channel 404, 408. The greater flow rate infirst channel 402, 406 enables the cooling fluid in the first channel402, 406 to absorb and remove a greater amount of heat from the injectorapparatus 128 adjacent to the first arcuate surface 242.

A direction of flow of cooling fluid flowing in the first channel 402,406 is opposite a direction of flow of the cooling fluid flowing in thesecond channel 404, 408. In some embodiments, the cooling fluid iswater. The rate of cooling fluid flowing through the injector apparatus128 is selected to maintain a temperature of the channels and conduitsat a desired temperature. For example, a maximum temperature of theinjector apparatus 128 may be maintained at about 300 degrees Celsius. Apressure of the cooling fluid flowing through the injector apparatus 128may be between about 20 psi and about 80 psi. This pressure produces aflow rate of the cooling fluid of between about 1 gallon per minute andabout 5 gallons per minute. In one embodiment, the flow rate of thecooling fluid is about 2 gallons per minute. A higher flow rate of thecooling fluid may improve efficiency of cooling the injector apparatus128.

As shown, a surface of the cap 304 confining a volume of the firstconduit or fourth conduit is co-planar with the surface 316. Asdescribed above, a volume of the first conduit 190 is less than a volumeof the second conduit 192. The smaller volume of the first conduit 190increases a velocity of a fluid flowing through the first conduit 190 tothe outlet 136A when compared to the fluid flow velocity through thesecond conduit 192, assuming an approximately and substantially constantfluid pressure for each of the first conduit 190 and the second conduit192.

FIG. 4B illustrates a schematic side cross-sectional view of a portionof the injector apparatus 128 according to an embodiment of thedisclosure. A first channel 410, a second channel 412, and a thirdchannel 414 are formed in the injector apparatus 128. The first channel410 is formed within the projection 240 of the injector apparatus 128adjacent to the first arcuate surface 242. The second channel 412 isformed adjacent to the second arcuate surface 244 and adjacent to thesurface 209 of the projection 240. The second channel 412 is disposed ona first side of the second conduit 192. The third channel 414 is formedadjacent to the second arcuate surface 244 and is disposed on a secondside of the second conduit 192 opposite the first side of the secondconduit 192.

A shape of the first channel 410 is configured to enable additivemanufacturing to be used to fabricate the first channel within theinjector apparatus 128. In one embodiment, one or more pillars 418extend through the second channel 412 and divide the second channel 412into two or more portions. Each portion of the second channel 412 has asimilar shape and size. In one embodiment, a shape or size of eachportion of the second channel 412 may be different than the adjacentportions of the second channel 412. The pillars 418 are fabricated tosupport the adjacent portions of the second channel 412 during theadditive manufacturing process. Thus, the pillars 418 enable fabricationof the second channel 412 using the additive manufacturing process.

Fabrication of each portion of the second channel 412 begins at a flatsurface 430. The portions of the second channel 412 are formed in theinjector body 125 by adding material around the second channel 412 asthe injector apparatus 128 is fabricated. The flat surface 430 of thesecond channel 412 is disposed a distance 416 from the second arcuatesurface 244. The distance 416 between the flat surface 430 and thesecond arcuate surface 244 is between about 1 mm and about 3 mm, forexample about 2 mm. A relatively short distance 416 (i.e., minimalthickness) between the second channel 412 and the second arcuate surface244 increases heat transfer from the injector apparatus 128 to fluid inthe second channel 412 during operation of the injector apparatus 128.

A curved surface 432 of the second channel 412 is formed opposite theflat surface 430. The curved surface 432 enables the additivemanufacturing process to enclose the second channel 412 without thematerial used to fabricate the injector apparatus 128 collapsing intothe second channel 412. In one embodiment, a size and shape of the thirdchannel 414 is substantially similar to that of each portion of thesecond channel 412.

A first duct 422 is formed through the injector apparatus. The firstduct 422 extends along and parallel to the second arcuate surface 244from the first end 250 to the second end 252. The first duct 422 isdisposed between the second channel 412 and the channel 310. The firstduct 422 is in fluid communication with the connections 212 and 234illustrated in FIGS. 2 and 3. A second duct 420 is fabricated in theinjector apparatus 128 adjacent to the surface 316. The second duct 420extends along and tangential to the projection 240 from the first end250 to the second end 252. The second duct 420 is parallel to the firstduct 422. One or more tubes 424 extend between the first duct 422 andthe second duct 420. In one embodiment, the first duct 422 and thesecond duct 420 are semi-toroidal. In one embodiment, the one or moretubes 424 are cylindrical. The first duct 422 and the second duct 420are in fluid communication via the one or more tubes 424. In oneembodiment, a diameter of the first duct 422 is substantially equal to adiameter of the second duct 420.

A third duct 440 is formed in the injector apparatus 128. The third ductis in fluid communication with the connection 216 illustrated in FIGS. 2and 3. In one embodiment, the third duct 440 extends along the surface314 and the surface 316. The third duct 440 is disposed between thesurface 316 and the channel 310. The third duct 440 is semi-toroidal. Inone embodiment, a diameter of the third duct 440 is less than thediameter of the first duct 422 and the diameter of the second duct 420.

FIG. 5 illustrates a schematic cross-sectional view of the injectorapparatus 128. As shown, the injector body 125 of the injector apparatus128 is disposed through the baseplate 131 of a process chamber, such asprocess chamber 100 depicted in FIG. 1. A mounting plate 150 mounts theinjector apparatus 128 to the baseplate 131 of the process chamber 100.Seals 502 and 504 fluidly seal the process volume 110 from an atmosphereexternal to the process chamber 100. In one embodiment, the seals 502,504 are O-rings fabricated from an elastomeric material.

An injector shield 506 is disposed between the process volume 110 andthe injector apparatus 128. The injector shield 506 is configured toprevent or substantially reduce thermal radiation from propagating tothe injector apparatus 128 from the process volume 110. The injectorshield 506 is fabricated from an opaque material, such as an opaquequartz material or a silicon carbide material. The injector shield 506facing the process volume 110 is coupled to the first arcuate surface242 of the projection 240 and traverses an entirety of the first arcuatesurface 242. The injector shield 506 separates the injector apparatus128 from the process volume 110 to prevent metal particles from theinjector apparatus 128 from entering the process volume 110.

For an injector shield 506 fabricated from a quartz material, a surface512 of the shield 506 facing the process volume 110 absorbs thermalradiation from the process volume 110 while an opposing surface 616 ofthe shield 506 facing the injector body 125 remains cooler due tothermal shielding of the quartz shield. For an injector shield 506fabricated from a silicon carbide material, a temperature of bothsurfaces 512 and 616 is believed to increase due to thermal radiation inthe process volume 110 absorbed by the silicon carbide shield. However,an increase in temperature of the injector shield 506 is offset by theflow of cooling fluid through the first channel 402, 406. During acleaning process, thermal radiation absorbed by the injector shield 506is believed to assist in removing deposited material from the surface512.

One or more holes 508 are formed through the injector shield 506. Eachof the holes 508 are aligned with each of the outlets 136A formed in theprojection 240. As such, the holes 508 (and the outlets 136A) are influid communication with the first conduit 190 formed within theinjector body 125. One or more slots 510 are also formed through theinjector shield 506. The one or more slots 510 are disposedsubstantially coplanar with the surface 312 of the projection 240. Assuch, the one or more slots 510 are disposed horizontally out of planewith the one or more holes 508. The one or more slots 510 are in fluidcommunication with the first purge outlet 302 (not shown) and the thirdconduit (not shown) formed within the injector body 125. The one or moreslots 510 are discussed in greater detail with respect to FIG. 6.

FIG. 6 illustrates a schematic cross-sectional view of a portion of theinjector apparatus 128. As discussed above, the first purge outlet 302is formed in the surface 316 of the recess 308. A third conduit 602 isformed within the injector body 125. A liner 614 is positioned betweenthe injector shield 506 and the first quartz window 120. One or moreoutlets 608 are formed through the liner 614. The one or more outlets608 are in fluid communication with a purge plenum 604 via one or morepurge channels 612. The one or more outlets 608 are disposed between theinjector shield 506 and the first quartz window 120. The purge plenum isformed between the projection 240 and the liner 614. The purge plenum604 is in fluid communication with the third conduit 602 via the firstpurge outlet 302. The one or more slots 510 are also in fluidcommunication with the purge plenum 604 via one or more purge channels610.

A first purge gas in the third conduit 602 enters the process volume 110through the one or more slots 510 and the one or more outlets 608 viathe one or more purge channels 610 and 612. The first purge gas flowsfrom the third conduit 602 and into the purge plenum 604 via the firstpurge outlet 302. The first purge gas flows to the process volume 110from the purge plenum via the one or more purge channels 610 and 612.

The first purge gas is selected from one or more of hydrogen, nitrogen,ammonia, other like gases, and any combination thereof. The first purgegas enters the process volume 110 through one or both of the one or moreslots 510 and the one or more outlets 608 and separates the processgases, which enter the process volume 110 through the holes 508, fromcontacting the first quartz window 120. The first purge gas prevents orsubstantially reduces the process gases from expanding in the processvolume 110 and from diffusing to the first quartz window 120. In oneembodiment, the first purge gas enters the process volume 110 at a rateand velocity different from that of the process gases.

FIG. 7 illustrates a schematic representation of a computer system 700with a computer-readable medium according to one embodiment. As shown,the computing system 700 includes a central processing unit (CPU) 702for executing programming instructions and one or more input/output(I/O) device interfaces 704, which enables connection to various I/Odevices 706 (e.g., keyboards, displays, mouse devices, pen inputs,etc.). The system 700 also includes a network interface 708, which mayinclude, for example, a transceiver for transmitting and receiving datafrom an external network, such as a network 710. The system furtherincludes a memory 720, such as a volatile random access memory, astorage 730, such as a non-volatile disk drive, RAID array, etc., and aninterconnect 715, such as a data bus. In some examples, some or all ofthe storage 730 may be remote from the computing system 700 (not shown)and may instead be accessed via the network interface 708. The CPU 702retrieves and executes executable instructions stored in the memory 720via the interconnect 715. The CPU 702 also retrieves and processes datafrom storage 730.

In one embodiment, an additive manufacturing process, such as threedimensional printing (3-D printing), is used to fabricate an injectorapparatus 128 as described herein. In one embodiment, a computer aideddesign (CAD) model of the injector apparatus 128 is first made and thena slicing algorithm maps the information for every layer. A layer startsoff with a thin distribution of powder spread over the surface of apowder bed. A chosen binder material then selectively joins particleswhere the object is to be formed. Then, a piston, which supports thepowder bed and the part-in-progress, is lowered in order for the nextpowder layer to be formed. After each layer, the same process isrepeated followed by a final heat treatment to make the object. Since3-D printing can exercise local control over the material composition,microstructure, and surface texture, various (and previouslyinaccessible) geometries may be achieved with this method.

In one embodiment, an injector apparatus 128 as described herein isrepresented in a data structure readable by a computer rendering deviceor a computer display device. The computer-readable medium contains adata structure that represents the injector apparatus 128. The datastructure is a computer file and contains information about thestructures, materials, textures, physical properties, or othercharacteristics of one or more articles (e.g. the injector apparatus128). The data structure also contains code, such as computer executablecode or device control code that engages selected functionality of acomputer rendering device or a computer display device. The datastructure is stored on the computer-readable medium, such as the memory720. The computer readable medium includes a physical storage mediumsuch as a magnetic memory, floppy disk, or any convenient physicalstorage medium. The physical storage medium is readable by the computersystem 700 to render the article represented by the data structure on acomputer screen or a physical rendering device which may be an additivemanufacturing device, such as a 3D printer.

While the foregoing is directed to embodiments of the presentdisclosure, other and further embodiments of the disclosed subjectmatter may be devised without departing from the basic scope thereof,and the scope thereof is determined by the claims that follow.

1. An injector apparatus, comprising: an injector body; a first arcuatesurface of the injector body having a first outlet formed therein, thefirst outlet in fluid communication with a first conduit formed withinthe injector body; a second arcuate surface of the injector body havinga second outlet formed therein, the second outlet in fluid communicationwith a second conduit formed within the injector body; a first portionof a channel formed within the injector body, the first portion of thechannel disposed on a first side of the first conduit and a second sideof the first conduit opposite the first side of the first conduitadjacent to the first arcuate surface; and a second portion of thechannel formed within the injector body, the second portion of thechannel disposed on a first side of the second conduit and a second sideof the second conduit opposite the first side of the second conduitadjacent to the second arcuate surface.
 2. The injector apparatus ofclaim 1, wherein a volume of the first portion of the channel is lessthan a volume of the second portion of the channel.
 3. The injectorapparatus of claim 1, wherein the first arcuate surface is disposedradially inward of the second arcuate surface.
 4. The injector apparatusof claim 1, further comprising: an injector shield disposed adjacent tothe first arcuate surface, the injector shield having a hole formedthere through aligned with the first outlet.
 5. The injector apparatusof claim 1, further comprising: a third arcuate surface of the injectorbody substantially perpendicular to the first arcuate surface and thesecond arcuate surface; and a third outlet formed in the third arcuatesurface, the third outlet in fluid communication with a third conduitformed within the injector body.
 6. The injector apparatus of claim 1,wherein the injector body comprises stainless steel or alloys thereof.7. The injector apparatus of claim 1, wherein the first conduit and thesecond conduit are electropolished and have a RMS surface roughness ofless than about 0.5 microns.
 8. The injector apparatus of claim 1,wherein a volume of the first portion of the channel is larger than avolume of the second portion of the channel.
 9. A substrate processingapparatus, comprising: a chamber body enclosing a process volume; ahousing structure enclosing the chamber body; a plurality of heatinglamps disposed within the housing structure; a first quartz windowdisposed within the housing structure between the process volume and theplurality of heating lamps; and an injector apparatus coupled to thechamber body, the injector apparatus comprising: an injector body; afirst arcuate surface of the injector body having a first outlet formedtherein, the first outlet in fluid communication with a first conduitformed within the injector body; a second arcuate surface of theinjector body having a second outlet formed therein, the second outletin fluid communication with a second conduit formed within the injectorbody; a first portion of a channel formed within the injector body, thefirst portion of the channel disposed on a first side of the firstconduit and a second side of the first conduit opposite the first sideof the first conduit adjacent to the first arcuate surface; and a secondportion of the channel formed within the injector body, the secondportion of the channel disposed on a first side of the second conduitand a second side of the second conduit opposite the first side of thesecond conduit adjacent to the second arcuate surface.
 10. The substrateprocessing apparatus of claim 9, wherein a volume of the first portionof the channel is less than a volume of the second portion of thechannel.
 11. The substrate processing apparatus of claim 9, wherein thefirst arcuate surface is disposed radially inward of the second arcuatesurface.
 12. The substrate processing apparatus of claim 9, wherein theinjector apparatus further comprises: an injector shield disposedadjacent to the first arcuate surface, the injector shield having a holeformed there through aligned with the first outlet.
 13. The substrateprocessing apparatus of claim 9, wherein the injector apparatus furthercomprises: a third arcuate surface of the injector body substantiallyperpendicular to the first arcuate surface and the second arcuatesurface; and a third outlet formed in the third arcuate surface, thethird outlet in fluid communication with a third conduit formed withinthe injector body.
 14. The substrate processing apparatus of claim 9,wherein the injector body comprises stainless steel or alloys thereof.15. The substrate processing apparatus of claim 9, wherein the firstconduit and the second conduit are electropolished and have a RMSsurface roughness of less than about 0.5 microns.
 16. A structureembodied in a machine readable medium used in a design process, thestructure comprising: an injector body; a first arcuate surface of theinjector body having a first outlet formed therein, the first outlet influid communication with a first conduit formed within the injectorbody; a second arcuate surface of the injector body having a secondoutlet formed therein, the second outlet in fluid communication with asecond conduit formed within the injector body; a first portion of achannel formed within the injector body, the first portion of thechannel disposed on a first side of the first conduit and a second sideof the first conduit opposite the first side of the first conduitadjacent to the first arcuate surface; and a second portion of thechannel formed within the injector body, the second portion of thechannel disposed on a first side of the second conduit and a second sideof the second conduit opposite the first side of the second conduitadjacent to the second arcuate surface.
 17. The structure of claim 16,wherein the structure resides on storage medium as a data format usedfor an exchange of layout data.
 18. The structure of claim 16, whereinthe structure includes at least one of test data files, characterizationdata, verification data, or design specifications.
 19. The structure ofclaim 16, wherein a volume of the first portion of the channel is lessthan a volume of the second portion of the channel.
 20. The structure ofclaim 19, wherein the first arcuate surface is disposed radially inwardof the second arcuate surface.